Begell House作者，编辑及审稿者

Z. Rymuza

Warsaw University of Technology PI. Politechniki 1 / 00-664 Warszawa Poland
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Articles

THIN FILMS OF SILICON COMPOUNDS DEPOSITED BY PE-CVD AT ATMOSPHERIC PRESSURE Vol. 6 '2002 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes