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Progress in Plasma Processing of Materials, 2001

ISBN 打印:
1-56700-165-3

EQUILIBRIUM AND NON-EQUILIBRIUM PHENOMENA IN ARCS AND TORCHES

Joost J. A. M. van der Mullen
Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

Abstract

A general treatment of non-equilibrium plasma aspects is obtained by relating transport fluxes to equilibrium restoring processes in so-called disturbed Bilateral Relations. The (non) equilibrium stage of a small microwave induced plasma serves as case study.