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Progress in Plasma Processing of Materials, 2001

ISBN 打印: 1-56700-165-3

INVESTIGATION ON OPERATING CONDITIONS AND EFFICIENCY OPTIMIZATION OF RF-RF HYBRID PLASMA TORCHES

Abstract

A numerical investigation on RF-RF hybrid plasma torches has been performed with the aim of selecting optimum operating conditions for different torch configurations, with or without intermediate injection of secondary gas. Results show the possibility of reducing considerably the sustaining power, while guaranteeing the required enthalpy content of the gas at the exit of the torch. Moreover, the existence of two separable sets of equilibrium configurations for the plasma has been found in some cases.
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