请登录 0 购物车
首页 图书 电子图书 期刊 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录
Progress in Plasma Processing of Materials, 2001

ISBN 打印: 1-56700-165-3

PLASMA PROCESSES IN PV SOLAR CELLS (a-Si:H)

Abstract

The state of the art of amorphous silicon thin films deposited in PECVD processes for solar cells applications is reviewed. Precursors such as silane, tri and tetra chloro-silane as monomers in Ar, H2 and Ar+H2 gas mixtures or pure silane plasmas were mainly used in the deposition of amorphous or micro-crystalline Si thin films. Reactions kinetics in the plasma bulk and in the plasma surface (solid) interactions as measured by mass spectrometry in real time, on line, show the governing species the particulate contamination's and the rate determining steps in the deposition process. The degradation of a-Si:H solar cells at intense illumination i.,e.,at elevated temperatures and the inhibition of the degradation processes by the addition of Ar to the silane plasmas will be discussed.
首页 Begell Digital Portal Begell数据库 期刊 图书 电子图书 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录 订购及政策 关于BegellHouse 联系我们 Language English 中文 Русский 日本語 Português Deutsch Français Español