请登录 0 购物车
首页 图书 电子图书 期刊 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录
Progress in Plasma Processing of Materials, 2001

ISBN 打印: 1-56700-165-3

INVESTIGATION OF SPATIAL CHARGE SHELL OF SPECIMEN IN INDUCTIVE COUPLED RF DISCHARGE AT LOW PRESSURE

Abstract

The nlagnitude of the positive charge shell and energy of ions in a vicinity of a processed product and ionic current density onto a surface in an inductive coupled RF discharge at lowered pressure is measured. A single electrostatic probe, an analyzer of energy of ions based on a coaxial-cylinder capacitor and two-beanl laser interferOlneter were used for Ineasuring paralneters of a positive charge shell.
It is defined that thickness of positive charge shell is fronl 0,3 up to 0,5 DIm. Energy of ions acting on a sanlple surface Wi and ionic current density onto the surface ji was in the following ranges: Wi = 10−50 eV, ji = 1.5−25 A/m2. It is established, that when a dielectric specimen is treated, the nlagnitude of ions energy is larger than 0 when a conductor specilnen is treated.
Investigations of RFI plaslna under lo\vered pressure show that RF discharge burns between the product the upper coil ofthe inductor.
首页 Begell Digital Portal Begell数据库 期刊 图书 电子图书 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录 订购及政策 关于BegellHouse 联系我们 Language English 中文 Русский 日本語 Português Deutsch Français Español