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Progress in Plasma Processing of Materials, 1997

ISBN 打印: 1-56700-093-2

CHARGEDPARTICLE DENSITYPROFILES IN LOWPRESSURE PULSE DISCHARGEOF ELECTRONEGATIVE GASES

Abstract

Electron, positive and negative ion kinetics and their densities ne, np, nn profiles forming in electronegative plasma of narrow pulse-periodic discharge, when a pulse duration ti less than time of an establishment of stationary density profiles tsp, are discussed. Densities ne, np, nn increasing in an active phase and two-stage plasma decay in pauses between pulses in the case of when nn(ti) > ne(ti) are analyzed. It is draw attention that the charged particle kinetics under consideration both during discharge pulses and in pauses between them ne, np, nn profiles can be supposed, as similar and not changing in time. Bessel type of ne, np, nn profiles in an oxygen plasma for ti < tsp are confirmed in experiment.
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