Progress in Plasma Processing of Materials, 1999

ISBN Print: 1-56700-126-2

POSSIBILITY OF COMPOSITE SILICON NITRIDE + SILICON CARBIDE (Si3N4 _ SiC) POWDER PRODUCTION IN THERMAL PLASMA

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DOI: 10.1615/ITPPC-1998.870
pages 593-600

Zivota G. Kostic Institute of Nuclear Sciences "Vinca", Department for Thermal Engineering and Energy Research -11001 Belgrade, PO Box 522, Yugoslavia

Predrag Lj. Stefanovic Institute of Nuclear Sciences "Vinca", Laboratory for Thermal Engineering and Energy, Mike Petrovica-Alasa 12-14, PO Box 522,11001 Belgrade, Yugoslavia

Pavle B. Pavlovic The VINCA Institute of Nuclear Sciences, Laboratory for Thermal Engineering and Energy, P. O. Box 52211001 Belgrade, Yugoslavia

Dejan B. Cvetinovic Institute of Nuclear Sciences "Vinca", Laboratory for Thermal Engineering and Energy, Mike Petrovica-Alasa 12-14, PO Box 522,11001 Belgrade, Yugoslavia

Abstract

The results of equilibrium composition computation and total (including heat of formation) enthalpy calculation, in the temperature range of 1000 to 6000 K and at pressure of 1 bar, for the Si-C-H-N system are presented in the paper. These data enable the determination and optimization of mass, temperature and energy parameters of the powder production process of composite silicone nitride + silicone carbide (Si3N4 _ SiC) by silicon powder evaporation in nitrogen plasma, followed by reactive quenching with cold methane. The way of using the system enthalpy - temperature interdependence for the prediction of temperature mass and energy parameters of the process, has been illustrated on the presented example.

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