请登录 0 购物车
首页 图书 电子图书 期刊 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录
Progress in Plasma Processing of Materials, 1999

ISBN 打印: 1-56700-126-2

MOLECULAR EMISSION SPECTROSCOPY FOR DIAGNOSTICS OF MAGNETICALLY ENHANCED RF DISCHARGE

Abstract

RF capacitive discharges enhanced by an external magnetic field were investigated in air, pure methane and methane/argon mixture. The discharge operating parameters were varied in the ranges: frequency 13.56 MHz, pressure 0.1 - 10 Pa, dissipated power 70 - 80 W, magnetic field induction 0 - 200 G. Nitrogen molecules in air plasma and CH radicals in methane and methane/argon plasma were studied by molecular emission spectroscopy methods. Rotational and vibrational temperatures of these molecules and radicals were estimated as a functions of the discharge parameters. In addition, the gas temperature were measured using a thermocouple.
首页 Begell Digital Portal Begell数据库 期刊 图书 电子图书 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录 订购及政策 关于BegellHouse 联系我们 Language English 中文 Русский 日本語 Português Deutsch Français Español