请登录 0 购物车
首页 图书 电子图书 期刊 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录
Progress in Plasma Processing of Materials, 1999

ISBN 打印: 1-56700-126-2

SIMULATION OF THE TREATMENT OF SOLID SURFACES USING LOW PRESSURE RF PLASMA STREAM

Abstract

A mathematical model of the treatment of solid surfaces with a stream of the induction or capacitative or hybrid (both inductive and capacitative) coupled RF plasma at low pressure is discussed. The mathematical model describes the process of generating the plasma stream inside the plasma torch as well as the interaction between the plasma stream and the solid surface. The spatial distributions of the concentration and the average temperature of electrons, the intensity of electric and magnetic fields, the gas pressure and speeds in the quasi-neutral plasma, the average energy of the ion bombardment of the surface and the ion current onto the surface from the layer of the positive charge near the surface were calculated.
首页 Begell Digital Portal Begell数据库 期刊 图书 电子图书 参考文献及会议录 作者,编辑,审稿 A-Z 产品目录 订购及政策 关于BegellHouse 联系我们 Language English 中文 Русский 日本語 Português Deutsch Français Español