THEORETICAL AND EXPERIMENTAL INVESTIGATIONS OF MODIFICATION OF MATERIALS AT LOW PRESSURE RF PLASMAS

Abdullin, I. A.; Jeltoukhine, Victor; Meckeshkin-Abdullin, A.

Progress in Plasma Processing of Materials, 2003

ISBN 打印: 978-1-56700-192-1

ISBN 在线: 978-1-56700-447-2

THEORETICAL AND EXPERIMENTAL INVESTIGATIONS OF MODIFICATION OF MATERIALS AT LOW PRESSURE RF PLASMAS

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I. A. Abdullin Kazan State Technological University, Kazan, Russian Federation

Victor Jeltoukhine Dpt. of Calculating Mathematics and Cybernetics -Kazan State University 18, Kremlyovskaya str., Kazan 420008 - Russia

A. Meckeshkin-Abdullin Dpt. of Light Industries - Kazan State Technological University 68, K.Marks str., Kazan 420015 - Russia

Abstract

Authors present a physical and mathematical model of low-pressure RF plasma processing of solid surfaces. It is showed that the ion energy E_i. and the ion current density j_i. onto the solid surface, which are the major generalized parameters of RF plasma treatment of solids, are achieved to values E_i = 10 ÷ 100 eV, j_i = 0.3 ÷ 25 A·m⁻².

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