SYNTHESIS OF THIN FILMS WITH CONTROLLED ABSORPTION BY JET INDUCTIVE COUPLED RF PLASMA TORCH

Abdullin, I. A.; Galiaoutdinov, R. T.; Kashapov, Nail F.

Progress in Plasma Processing of Materials, 2001

ISBN Druckformat: 1-56700-165-3

SYNTHESIS OF THIN FILMS WITH CONTROLLED ABSORPTION BY JET INDUCTIVE COUPLED RF PLASMA TORCH

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I. A. Abdullin Kazan State Technological University, Kazan, Russian Federation

R. T. Galiaoutdinov Scientific and Research Institute of Pumping Engineering Technology apart. 20, house 42, Gavrilova str., Kazan 420137, Russia

Nail F. Kashapov Kazan Federal University, 18 Kremlevskaya Str., Kazan, 420008, Russia

Abstrakt

The thin-film coatings of SiO_x and TiO_x (0 < x < 2) with controlled absorption received by low pressure RF plasma are- investigated in the present work.

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