Progress in Plasma Processing of Materials, 1997

ISBN Print: 1-56700-093-2

OFF-LINE STUDIES OF PLASMA SURFACE INTERACTIONS BETWEEN A RF PLASMA JET AND 3W/0 BORON DOPED GRAPHITE

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DOI: 10.1615/ITPPC-1996.1070
pages 907-914

R. Avni Euro-Consultants (Israel), 10 Dov Friedman St. Ramat Gan, Israel

I. Mabille-Rouger Laboratoire de Genie des Procedes Plasmas ENSCP/UPMC 11 rue P. et M. Curie 75231 Paris Cedex 05 France

J. Erin Laboratoire de Genie des Procedes Plasmas ENSCP/UPMC 11 rue P. et M. Curie 75231 Paris Cedex 05 France

Daniel Morvan Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Jacques Amouroux Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

D. Bouchier IEF - CNRS URA 22. Orsay University Bat 220, 91405 Orsay Cedex France

J. Winter IPP, Research Center Julich. PoB 1913 D5 2425 Julich FRG

H. Nickel IPP, Research Center Julich. PoB 1913 D5 2425 Julich FRG

Abstrakt

The aim of this study is to understand the damage produced to the sample surface of a doped graphite with 3 w/o boron exposed to an oxidizing plasma jet ((Ar/02) and (Ar/H2O) and a reducing (Ar/H2) plasma jet). The surface damage and depth profile were investigated by a scanning Auger Electron Spectrometry (AES). A total quantitative sample analysis, before and after exposing it to the plasma jet, was performed by Inductively Coupled Plasma Atomic Emission Spectroscopy (ICPAES). The damage surface mechanism including segregation phenomena in the 3 w/o boron doped graphite samples is proposed and related to the surface phenomena in the fusion reactor "TEXTOR" at Julich Research Center.

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