Progress in Plasma Processing of Materials, 1997

ISBN Print: 1-56700-093-2

LANGMUIR PROBE MEASUREMENTS IN AN EXPANDING MAGNETIZED PLASMA

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DOI: 10.1615/ITPPC-1996.310
pages 255-261

G. J. H. Brussaard Department of Physics, Eindhoven University of Technology, P.O.Box 513, 5600 MB Eindhoven, The Netherlands

M. van der Steen Department of Physics, Eindhoven University of Technology, P.O.Box 513, 5600 MB Eindhoven, The Netherlands

M. Carrere Department of Physics, Eindhoven University of Technology, P.O.Box 513, 5600 MB Eindhoven, The Netherlands

E. A. H. Timmermans Department ofPhysics, Eindhoven University ofTechnology P.O. Box 513,5600 MB Eindhoven, The Netherlands

M.C.M. van de Sanden Eindhoven University of Technology, Department of Applied Physics, Den Dolech 2, 5600 MB Eindhoven, The Netherlands

Joost J. A. M. van der Mullen Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

D. C. Schram Dept. of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands

Abstrakt

Langmuir probe measurements are performed in magnetized expanding plasmas of different compositions. Under the assumption that a function fitted to results in argon is valid in other plasmas, it is possible to investigate the influence of the magnetic field in nitrogen and hydrogen plasmas. It is found that the electron density in nitrogen can be increased by a factor of 10 by the application of a magnetic field of 4.5 mT. In hydrogen the density can be increased by a factor of 100 by a magnetic field of 20 mT. The dominant ionic species in the magnetized nitrogen and hydrogen plasmas is found to be the atomic ion (N+and H+, respectively).

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