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Flexible Automation and Integrated Manufacturing 1998

ISBN Druckformat: 978-1-56700-118-1

Combined Simulation Modelling for Managing Wafer Fabrication Facilities

Abstrakt

Wafer fabrication is fast becoming one of the key sectors in high-value added semiconductor manufacturing. With world wide competition growing more intense, the techniques of simulation have been widely used as a tool for evaluating and improving the production performance of wafer fabrication facilities. Through an evaluation of the existing simulation modelling approaches, this paper describes a combined simulation model that analyses a wafer production facility for a leading semiconductor manufacturer in Singapore. The combined model proposed is much more efficient than purely discrete or continuous modelling in evaluating and improving the production performance. It is also time-justifiable due as the execution time of the model is greatly reduced. Finally, it is flexible as it can be used at different levels to provide decision-making support.
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