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Progress in Plasma Processing of Materials, 1999

ISBN Druckformat: 1-56700-126-2

NUMERICAL MODEL OF LOW-PRESSURE PLASMA FORMATION IN TWO-ELECTRODELY GAP WITH THE COLD CATHODE

Abstrakt

Suggested physical-mathematical model of the discharge formation in the two-electrodely gap with the cold cathode. Numerical simulation has confirmed suggested model. The results of the discharge formation simulation in the diode gap with a cold cathode have confirmed the dependence of plasma parameters on secondary emission ratio of the cathode, filling gas pressure, interelectrode space and other factors.
The numerical simulation results are in good agreement with quantitative characteristics of physical experiment. Restrictions put on the field of the model application are connected with processes of elementary particles interactions.
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