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Progress in Plasma Processing of Materials, 2001

ISBN Druckformat: 1-56700-165-3

NUMERICAL MODELING OF RF-RF HYBRID PLASMA TORCHES AND PARAMETRIC STUDY FOR VARIOUS GEOMETRIC, FLOW AND ELECTRIC CONFIGURATIONS

Abstrakt

Two-dimensional (r, z) numerical codes have been developed in order to study RF-RF hybrid plasma torches, both in static and time-dependent conditions. The codes account for the non-conventional configuration of the induction coil and for the presence of a secondary gas injected axially or radially at intermediate positions of the torch. Selected results are presented from a detailed parametric study for various geometric, flow and electric configurations.
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