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Progress in Plasma Processing of Materials, 2001

ISBN Druckformat: 1-56700-165-3

INVESTIGATION OF SPATIAL CHARGE SHELL OF SPECIMEN IN INDUCTIVE COUPLED RF DISCHARGE AT LOW PRESSURE

Abstrakt

The nlagnitude of the positive charge shell and energy of ions in a vicinity of a processed product and ionic current density onto a surface in an inductive coupled RF discharge at lowered pressure is measured. A single electrostatic probe, an analyzer of energy of ions based on a coaxial-cylinder capacitor and two-beanl laser interferOlneter were used for Ineasuring paralneters of a positive charge shell.
It is defined that thickness of positive charge shell is fronl 0,3 up to 0,5 DIm. Energy of ions acting on a sanlple surface Wi and ionic current density onto the surface ji was in the following ranges: Wi = 10−50 eV, ji = 1.5−25 A/m2. It is established, that when a dielectric specimen is treated, the nlagnitude of ions energy is larger than 0 when a conductor specilnen is treated.
Investigations of RFI plaslna under lo\vered pressure show that RF discharge burns between the product the upper coil ofthe inductor.
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