DIAGNOSTIC OF FLOW FIELDS OF SILICON PARTICLES IN AN RF PLASMA FOR PURIFICATION TREATMENTS

Magnaval, S.; Arnold, M.; Cazard-Juvernat, I.; Francke, E.; Morvan, Daniel; Amouroux, Jacques

Progress in Plasma Processing of Materials, 1997

ISBN Druckformat: 1-56700-093-2

DIAGNOSTIC OF FLOW FIELDS OF SILICON PARTICLES IN AN RF PLASMA FOR PURIFICATION TREATMENTS

S. Magnaval Laboratoire de Génie des Precédés Plasmas, Université P.et M. Curie ENSCP, 11 rue P.et M. Curie, 75005 Paris - France

M. Arnold Laboratoire de Génie des Precédés Plasmas, Université P.et M. Curie ENSCP, 11 rue P.et M. Curie, 75005 Paris - France

I. Cazard-Juvernat Laboratoire de Génie des Precédés Plasmas, Université P.et M. Curie ENSCP, 11 rue P.et M. Curie, 75005 Paris - France

E. Francke Laboratoire de Génie Procédés Plasmas et Traitement de Surface, Université Pierre et Mane Curie- ENSCP 11-13, rue Pierre et Marie Curie 75231 Paris Cedex 05 France

Daniel Morvan Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Jacques Amouroux Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Abstrakt

The determination of experimental working conditions to treat injected powder has been made by different physical analyses. The velocities and sizes of the particles in an RF plasma have been characterized by Laser Doppler Anemometry and Phase Doppler Anemometry. The different experimental parameters have been studied such as the powder particle size distribution, the power applied and the chemical composition of the plasma gas. The introduction of the hydrogen into the plasma has shown to be efficient to eliminate oxygen, carbon and boron.

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