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Proceedings of Symposium on Energy Engineering in the 21st Century (SEE2000) Volume I-IV

ISBN Print: 1-56700-132-7

UNSTEADY HEAT AND MASS TRANSFER FOR MULTI-COMPONENT PARTICLE DEPOSITION IN THE MODIFIED CHEMICAL VAPOR DEPOSITION

Abstract

A numerical analysis of unsteady heat and mass transfer for multi-component particle deposition in the Modified Chemical Vapor Deposition has been carried out. The earlier study showed that the optimized torch speed variation could be used to enhance the deposition uniformity of single component SiO2 particle. However, this optimized torch speed resulted in the deterioration of GeO2 deposition uniformity for multi-component SiO2/GeO2 deposition. Parametric studies varying three different operating conditions in time, maximum wall temperature, torch speed and in-take amount of GeCl4 reveals that the uniformity of SiO2 deposition is maintained by torch speed variation and that of GeO2 is obtained by increasing the in-take flow rate of GeCl4 in time.
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