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Progress in Plasma Processing of Materials, 1999

ISBN Print: 1-56700-126-2

RATE CONSTANTS OF UNIMOLECULAR REACTIONS OF SF6 AND PRODUCTS OF ITS DISSOCIATION AT THE LOW PRESSURE LIMIT

Abstract

This paper describes the calculation of unimolecular dissociation of SF6, SF5, SF4, SF3, SF2 in temperature range T ∈ (500,6000) K at the low pressure limit. The theory is based on the solution of the master equation. The strong collision assumption is used. The basic simplified expression for harmonic oscillator model is improved by factors of anharmonicity, energy dependence of the density of states and external and internal rotations.
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