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Progress in Plasma Processing of Materials, 1999

ISBN Print: 1-56700-126-2

CALCULATION OF A TWO-TEMPERATURE PLASMA COMPOSITION IN MOLECULAR GASES; EXAMPLE OF SF6

Abstract

We have used two sets of laws for computing the two-temperature composition of an SF6 plasma for several pressure values. The results show that the number densities of dominant species depend weakly on the choice of 2T laws whereas the number density of diatomic molecules or ions is influenced by this choice. Finally, when the excitation temperature depends on the electron density - which seems the most realistic condition - the evolution of several species concentrations versus Te present very steep variations (around Te < 8000 K).
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