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E. Fourmond

Laboratoire de Physique de la Matiere, UMR 5511, 7 av. J. Capelle, INSA, 69621 Villeurbanne cedex, France
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Articles

MICROWAVE PECVD SYSTEM FOR SiNx:H ANTIREFLECTION COATINGS AND HYDROGEN PASSIVATION ON MULTICRYSTALLINE SILICON Vol. 7 '2003 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes
MICROWAVE PECVD SYSTEM FOR SiNx:H ANTIREFLECTION COATINGS AND HYDROGEN PASSIVATION ON MULTICRYSTALLINE SILICON Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003
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