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Progress in Plasma Processing of Materials, 2001

ISBN Print: 1-56700-165-3

CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON−EQUILIBRIUM MODEL OF AR PLASMA

Abstract

Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz, power 2 − 4 kW, inner diameter of the torch 24 mm plasma gas - argon. Plasma torch has three axial gas flows: sheath gas Gl=20 l/min, plasma gas G2=2.4 i/min, transport gas G3=3.4 l/min. Calculation has been performed within the frame of the method of control volume. The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.
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