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Progress in Plasma Processing of Materials, 1997

ISBN Print: 1-56700-093-2

OFF-LINE STUDIES OF PLASMA SURFACE INTERACTIONS BETWEEN A RF PLASMA JET AND 3W/0 BORON DOPED GRAPHITE

Abstract

The aim of this study is to understand the damage produced to the sample surface of a doped graphite with 3 w/o boron exposed to an oxidizing plasma jet ((Ar/02) and (Ar/H2O) and a reducing (Ar/H2) plasma jet). The surface damage and depth profile were investigated by a scanning Auger Electron Spectrometry (AES). A total quantitative sample analysis, before and after exposing it to the plasma jet, was performed by Inductively Coupled Plasma Atomic Emission Spectroscopy (ICPAES). The damage surface mechanism including segregation phenomena in the 3 w/o boron doped graphite samples is proposed and related to the surface phenomena in the fusion reactor "TEXTOR" at Julich Research Center.
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