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Progress in Plasma Processing of Materials, 1997

ISBN Print: 1-56700-093-2

DIAGNOSTIC OF FLOW FIELDS OF SILICON PARTICLES IN AN RF PLASMA FOR PURIFICATION TREATMENTS

Abstract

The determination of experimental working conditions to treat injected powder has been made by different physical analyses. The velocities and sizes of the particles in an RF plasma have been characterized by Laser Doppler Anemometry and Phase Doppler Anemometry. The different experimental parameters have been studied such as the powder particle size distribution, the power applied and the chemical composition of the plasma gas. The introduction of the hydrogen into the plasma has shown to be efficient to eliminate oxygen, carbon and boron.
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