STUDY OF FLOW FIELD TOPOLOGY IN AN ICP TORCH BY SURFACE PRESSURE MEASUREMENTS AND NUMERICAL CALCULATIONS

Chazot, O.

Progress in Plasma Processing of Materials, 2001

ISBN Print: 1-56700-165-3

STUDY OF FLOW FIELD TOPOLOGY IN AN ICP TORCH BY SURFACE PRESSURE MEASUREMENTS AND NUMERICAL CALCULATIONS

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O. Chazot Von Karman Institute for Fluid Dynamics 72 Chaussée de Waterloo 1640 Rhode St Genèse, BELGIUM

Abstract

Pressure measurements at the wall of the discharge channel in an ICP are presented. The precise interpretations of the experimental results are carried out by qualitative comparison with numerical simulations of the same flow conditions. The flow topology of the plasma discharge is studied for several working conditions. Such data bring relevant information for the development of ICP torch design and for their applications.

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