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Progress in Plasma Processing of Materials, 2001

1-56700-165-3 (Imprimir)

Modelling of an Argon-Hydrogen plasma expansion

K.T.A.L. Burm
Department of Applied Physics, Eindhoven University of Technology P.O. Box 513, 5600 MB Eindhoven

Maher I. Boulos
Department of Chemical Engineering University of Sherbrooke, 2500 Blvd. de lUniversite Sherbrooke J1К 2R1, PQ - Canada

Pierre Proulx
Chemical Engineering department, University of Sherbrooke

Bertrand Jodoin
Department of mechanical engineering, University of Ottawa, (Ontario) KIN 6N5; and Plasma Technology Research Centre (CRTP), Department of Chemical Engineering Universite de Sherbrooke, Sherbrooke (Qc) CANADA J1K 2R1


An expanding argon-hydrogen plasma is investigated by means of simulations. The effect of molecular hydrogen injection at the start of the expansion on the ionization degree and on the electron and the heavy particle temperatures in the expansion is studied. The used simulation model is the non-local thermal equilibrium one-dimensional model SPeX. The SPeX code is used to investigate the causes of deviation from temperature equilibrium and deviation from ionization-recombination equilibrium. SPeX is a hydrodynamic model specific for plasma expansions, solving the conservation balances of mass, momentum and energy. A decrease in ionization degree and deviations from local thermal equilibrium are shown after the injection of molecular hydrogen for the expansion from an inductively coupled plasma source with a separated Laval-nozzle.