Progress in Plasma Processing of Materials, 2001

ISBN Print: 1-56700-165-3

EQUILIBRIUM AND NON-EQUILIBRIUM PHENOMENA IN ARCS AND TORCHES

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DOI: 10.1615/ITPPC-2000.200
pages 139-147

Joost J. A. M. van der Mullen Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

Résumé

A general treatment of non-equilibrium plasma aspects is obtained by relating transport fluxes to equilibrium restoring processes in so-called disturbed Bilateral Relations. The (non) equilibrium stage of a small microwave induced plasma serves as case study.

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