Progress in Plasma Processing of Materials, 1997

ISBN Print: 1-56700-093-2

RAMAN AND RAYLEIGH SCATTERING COMBINED TO STUDY AIR ENTRAINMENT

DOI: 10.1615/ITPPC-1996.80
pages 59-68

Résumé

To study the entrainment of air into an inductively coupled argon plasma a technique is developed in which vibrational Raman scattering is combined with Rayleigh scattering. This makes it possible to measure the absolute particle densities of air and argon and the heavy particle temperature. The measurements show that at 2 mm above the end of the quartz torch and at 90% of the plasma radius 55% of the particles originate from air.