Progress in Plasma Processing of Materials, 1997

ISBN Print: 1-56700-093-2

NEW TRANSITION PROBABILITY VALUES FOR ARGON USED FOR MAPPING OPEN AND CLOSED INDUCTIVELY COUPLED PLASMAS

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DOI: 10.1615/ITPPC-1996.280
pages 229-237

Joost J. A. M. van der Mullen Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

R. D. Tas Department of Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

J. M. de Regt Department of Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

J. Jonkers Department ofPhysics, Eindhoven University ofTechnology P.O. Box 513,5600 MB Eindhoven, The Netherlands

Résumé

The open inductively coupled plasma (ICP) is used as an emission source for determining transition probabilities (A-values) of highly excited argon states. These higher states are proved to be populated according to the Saha formula. To establish the Saha densities we use the electron temperature from Thomson scattering together with the densities of three well-known levels by absolute line intensity (ALI) measurements. The obtained A-values are used to map electron density and temperature fields in closed and open ICP's.

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