Connexion utilisateur 0 Panier
Accueil Livres eBooks Revues spécialisées Références et comptes rendus Auteurs, éditeurs, examinateurs Index A-Z des produits
Progress in Plasma Processing of Materials, 2001

ISBN Imprimer: 1-56700-165-3

COMPARATIVE STUDY BETWEEN KINETIC AND THERMODYNAMIC CALCULATION OF COMPOSITION IN SF6 PLASMAS

Résumé

For an SF6 plasma at atmospheric pressure the compositions calculated in chemical equilibrium, in the multi-temperature model and using kinetics (33 reactions involving 18 species) are compared. The ratio of the electron temperature Te to that of heavy species Th was calculated as a function of electron density and an intermediate temperature T* between Te and Th was introduced to cope with the relationship kf(T*) / kr(T*) = Kx(T*) where kf and kr are the reaction rate coefficients (forward and reverse) and Kx the equilibrium constant. The main difference between equilibrium and kinetic calculations lies in the densities of S+, S2+, SF+, F and S species between 2000 and 6000 K. The multi-temperature method gives results very different from those of the kinetic calculations even when neglecting the charge loss reactions. This is in contrast to what happens with H2 or N2.
Accueil Portail numérique Begell Bibliothèque numérique Begell Revues spécialisées Livres eBooks Références et comptes rendus Auteurs, éditeurs, examinateurs Index A-Z des produits Prix et politiques d'abonnement A propos de Begell House Contactez-nous Language English 中文 Русский 日本語 Português Deutsch Français Español