Transport Phenomena in Thermal Engineering. Volume 2

ISBN Print: 1-56700-015-0

A STUDY OF HEAT TRANSFER AND PARTICLE DEPOSITION DURING OUTSIDE VAPOR DEPOSITION PROCESS

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DOI: 10.1615/ISTP-VI.540
pages 1119-1124

Younghuei Song Department of Mechanical Engineering, Seoul National University, Seoul, KOREA

Mansoo Choi National CRI Center for Nano Particle Control, School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151 -742, Korea

Shin Hyoung Kang Department of Mechanical Engineering, Seoul National University, Seoul, KOREA

Résumé

A study of heat transfer and particle deposition has been made numerically for Outside Vapor Deposition process. Heat conduction in the two layered cylinder which consists of the target and the deposited layer is considered together with heat transfer and gas jet flow onto the cylinder from the torch. Temperature and flow fields have been obtained by an iterative method and thermophoretic particle deposition has been studied. Of particular interests are effects of the thickness of the deposited layer, the torch speed, and the rotation speed of the cylinder on particle deposition flux and efficiency. Effects of buoyancy, variable properties and tube rotation are included.

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