Progress in Plasma Processing of Materials, 2003

ISBN Print: 978-1-56700-192-1

ISBN Online: 978-1-56700-447-2

DEPOSITION OF COATINGS BY A JET RF-PLASMA OF LOW PRESSURE

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DOI: 10.1615/ITPPC-2002.640
pages 515-521

R. T. Galiaoutdinov Scientific and Research Institute of Pumping Engineering Technology apart. 20, house 42, Gavrilova str., Kazan 420137, Russia

Nail F. Kashapov Kazan Federal University, 18 Kremlevskaya Str., Kazan, 420008, Russia

Résumé

Were investigated basic electrophysical and mechanical characteristics of a dielectric and metal films.

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