CHARACTERISATION OF ARGON PLASMAS PRODUCED BY THE

Jonkers, J.; van der Mullen, Joost J.  A. M.; Hartgers, A.; van de Sande, Marco  J.; Timmermans, E. A. H.; Schram, D. C.

Progress in Plasma Processing of Materials, 1999

ISBN Print: 1-56700-126-2

CHARACTERISATION OF ARGON PLASMAS PRODUCED BY THE "TORCHE À INJECTION AXIALE" (TIA)

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DOI: 10.1615/ITPPC-1998.450
pages 299-304

J. Jonkers Department ofPhysics, Eindhoven University ofTechnology P.O. Box 513,5600 MB Eindhoven, The Netherlands

Joost J. A. M. van der Mullen Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

A. Hartgers Eindhoven University of Technology, Department of Applied Physics, P.O.Box 513, DenDolech 2, Eindhoven, the Netherlands

Marco J. van de Sande Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

E. A. H. Timmermans Department ofPhysics, Eindhoven University ofTechnology P.O. Box 513,5600 MB Eindhoven, The Netherlands

D. C. Schram Dept. of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands

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