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Progress in Plasma Processing of Materials, 2001

ISBN:
1-56700-165-3 (印刷)

An Investigation of Plasma Expansion Jet Boundary Geometries

K.T.A.L. Burm
Department of Applied Physics, Eindhoven University of Technology P.O. Box 513, 5600 MB Eindhoven

W. J. Goedheer
FOM-Institute for Plasma Physics Rijnhuizen, Association EURATOM-FOM, Trilateral Euregio Cluster, PO Box 1207, 3430 BE Nieuwegein, The Netherlands

D. C. Schram
Dept. of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands

要約

Fluid dynamic results of an under-expanding argon plasma expanding from a cylinder symmetric arc, a high density source with small dimensions, into a low pressure vessel with large dimensions are presented.
The influence of different boundary jet geometries on the flow parameters and on recombination is examined by use of a plasma fluid model which can adapt the jet geometry. The fluid model is a radially integrated one-dimensional non-local thermal equilibrium model, which uses results from the gas dynamic theory of Prandtl - Meyer.