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Progress in Plasma Processing of Materials, 1997

ISBN 印刷:
1-56700-093-2

RAMAN AND RAYLEIGH SCATTERING COMBINED TO STUDY AIR ENTRAINMENT

Joost J. A. M. van der Mullen
Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

J. M. de Regt
Department of Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

F. P. J. de Groote
Department of Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

要約

To study the entrainment of air into an inductively coupled argon plasma a technique is developed in which vibrational Raman scattering is combined with Rayleigh scattering. This makes it possible to measure the absolute particle densities of air and argon and the heavy particle temperature. The measurements show that at 2 mm above the end of the quartz torch and at 90% of the plasma radius 55% of the particles originate from air.