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Progress in Plasma Processing of Materials, 1997

ISBN 印刷: 1-56700-093-2

ARGON PLASMA IN PRESENCE OF CARBON AND HYDROGEN ; FORMATION OF ATOMIC CARBON IN SOLID STATE FORM

要約

The composition of an argon plasma in presence of carbon and hydrogen is calculated under assumption of thermal equilibrium in temperature range 500−6000 K. The calculations are performed for a plasma treated as a single phase system but also for the plasma in equilibrium with carbon in the form of solid graphite. For different C/H ratios the highest possible temperatures at which carbon still appears in solid state form are determined. The results of plasma composition obtained for the plasma in presence of solid graphite are compared to those obtained neglecting the existence of the solid phase.
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