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Energy and the Environment, 1998

ISBN:
1-56700-127-0 (印刷)

ANALYSIS OF FLOW AND HEAT TRANSFER CHARACTERISTICS AND LIGA FABRICATION TECHNIQUE FOR A MICRO NOZZLE

G. J. Hwang
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan

W. P. Ma
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30043, Taiwan

H. S. Lin
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30043, Taiwan

要約

This paper presents the analysis of flow and heat transfer characteristics and LIGA fabrication technique for a micro nozzle. To visualize the flow in the micro nozzle, an experimental test model was built. A numerical solution covers the range of Re = 10−8 to 1.0 proves that flow characteristics for the micro nozzle and the test model are similar. The value of Peclet number in the test model can be adjust to the value closed to that in the micro nozzle. LIGA fabrication technique including lithography, electroforming and molding processes is a new technique for fabricating large number and high precision microstructures. The other advantages of using LIGA technique in making nozzles are its capability of high aspect ratio and flexibility of nozzle geometry. The textile industry requires a large quantity of micro spinnerets with high aspect ratio and different nozzle geometry. It is an ideal application of LIGA technique.