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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (印刷)

PLASMA-ASSISTED DEPOSITION OF NANOSTRUCTURED FILMS AND COATINGS

Steven L. Girshick
Department of Mechanical Engineering, University of Minnesota, 111 Church St. S.E. Minneapolis, MN 55455, USA

要約

Recent work is reviewed on plasma-assisted deposition of nanostructured films and coatings. Several methods are being developed. These include conventional plasma spray in which nanostructure is induced in the coarse feed powder by mechanical milling before spraying; thermal plasma spray pyrolysis; plasma flash evaporation of fine powders injected into an RF torch; hypersonic plasma particle deposition; and low-pressure plasma synthesis and deposition of nanoparticles to produce thin films.