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Progress in Plasma Processing of Materials, 1999

ISBN 印刷: 1-56700-126-2

MOLECULAR EMISSION SPECTROSCOPY FOR DIAGNOSTICS OF MAGNETICALLY ENHANCED RF DISCHARGE

要約

RF capacitive discharges enhanced by an external magnetic field were investigated in air, pure methane and methane/argon mixture. The discharge operating parameters were varied in the ranges: frequency 13.56 MHz, pressure 0.1 - 10 Pa, dissipated power 70 - 80 W, magnetic field induction 0 - 200 G. Nitrogen molecules in air plasma and CH radicals in methane and methane/argon plasma were studied by molecular emission spectroscopy methods. Rotational and vibrational temperatures of these molecules and radicals were estimated as a functions of the discharge parameters. In addition, the gas temperature were measured using a thermocouple.
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