カスタマーログイン 0 ショッピングカート
ホーム 書籍 電子書籍 ジャーナル 参考文献と会報 著者、編集者、レビュー者 A-Z商品インデックス
Progress in Plasma Processing of Materials, 1999

ISBN 印刷: 1-56700-126-2

SIMULATION OF THE TREATMENT OF SOLID SURFACES USING LOW PRESSURE RF PLASMA STREAM

要約

A mathematical model of the treatment of solid surfaces with a stream of the induction or capacitative or hybrid (both inductive and capacitative) coupled RF plasma at low pressure is discussed. The mathematical model describes the process of generating the plasma stream inside the plasma torch as well as the interaction between the plasma stream and the solid surface. The spatial distributions of the concentration and the average temperature of electrons, the intensity of electric and magnetic fields, the gas pressure and speeds in the quasi-neutral plasma, the average energy of the ion bombardment of the surface and the ion current onto the surface from the layer of the positive charge near the surface were calculated.
ホーム Begell Digital Portal Begellデジタルライブラリー ジャーナル 書籍 電子書籍 参考文献と会報 著者、編集者、レビュー者 A-Z商品インデックス 価格及び購読のポリシー Begell Houseの概要 連絡先 Language English 中文 Русский 日本語 Português Deutsch Français Español