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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (印刷)

THE ROLE OF MOLECULAR IONS IN ARGON PLASMAS OPERATED AT ATMOSPHERIC PRESSURE

J. Jonkers
Department ofPhysics, Eindhoven University ofTechnology P.O. Box 513,5600 MB Eindhoven, The Netherlands

Joost J. A. M. van der Mullen
Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

D. C. Schram
Dept. of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands