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Progress in Plasma Processing of Materials, 1999

ISBN:
1-56700-126-2 (印刷)

CHARACTERISATION OF ARGON PLASMAS PRODUCED BY THE "TORCHE À INJECTION AXIALE" (TIA)

J. Jonkers
Department ofPhysics, Eindhoven University ofTechnology P.O. Box 513,5600 MB Eindhoven, The Netherlands

Joost J. A. M. van der Mullen
Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

A. Hartgers
Eindhoven University of Technology, Department of Applied Physics, P.O.Box 513, DenDolech 2, Eindhoven, the Netherlands

Marco J. van de Sande
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

E. A. H. Timmermans
Department ofPhysics, Eindhoven University ofTechnology P.O. Box 513,5600 MB Eindhoven, The Netherlands

D. C. Schram
Dept. of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands