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Progress in Plasma Processing of Materials, 1999

ISBN 印刷: 1-56700-126-2

OSCILLATION PHENOMENA IN RECOMBINING PLASMAS

要約

This work is focused on the analysis of the oscillation character of electron temperature, electron density and concentration of excited atoms under plasma relaxation conditions. A theoretical model of this phenomenon is presented, which is based on self-consistent balance equations as a dynamic system.
It is shown that in case of a low ionisation degree the oscillations may arise when the relaxation frequencies of free electron energy losses, which are determined elastic electron-atom collisions, the radiative population of resonant levels and their quenching due to inelastic collisions are almost equal to each other. In case of rather high ionisation degree the self-oscillations can arise when the energy losses of free electrons are determined by electron-ion collisions.
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