カスタマーログイン 0 ショッピングカート
ホーム 書籍 電子書籍 ジャーナル 参考文献と会報 著者、編集者、レビュー者 A-Z商品インデックス
Progress in Plasma Processing of Materials, 1999

ISBN 印刷: 1-56700-126-2

VITREOUS SILICA LAYERS SYNTHESIZED BY AN INDUCTIVELY COUPLED PLASMA TORCH (ICPT) WORKING AT ATMOSPHERIC PRESSURE: DEPOSITION AND CHARACTERIZATION

要約

A home-made inductively coupled plasma torch (ICPT), working at atmospheric pressure, has been used for the synthesis of high-purity, low OH content, fused silica layers for application in the technological fields of fiber optics and optical waveguide production ([1], [2]). The gaseous reactants (SiCl4 and GeCl4) have been injected in the plasma tail and both rod and slab targets have been used and suitably moved to obtain deposited layers of good quality. The samples have been chemically and physically analyzed with the aim of testing their morphological and optical characteristics (refractive index, OH content) using various techniques (molecular microscopy, scanning electron microscopy, X-ray diffractometry, optical spectroscopy, refractive index profile analysis). A selection of results referring to the deposition of pure silica layers with very good optical and morphological characteristics will be described, together with a description of the ICPT system.
ホーム Begell Digital Portal Begellデジタルライブラリー ジャーナル 書籍 電子書籍 参考文献と会報 著者、編集者、レビュー者 A-Z商品インデックス 価格及び購読のポリシー Begell Houseの概要 連絡先 Language English 中文 Русский 日本語 Português Deutsch Français Español