カスタマーログイン 0 ショッピングカート
ホーム 書籍 電子書籍 ジャーナル 参考文献と会報 著者、編集者、レビュー者 A-Z商品インデックス
Progress in Plasma Processing of Materials, 2001

ISBN 印刷: 1-56700-165-3

INFLUENCE OF CATHODE SPUTTERING ON UPPER SURFACE OF α-IRON

要約

The author presents the results of studying the influence of the cathode sputtering on upper surface layer. The samples were cathode sputtered in nitrogen atmosphere with following ranges of parameters: voltage 700-1350 V, intensity 1-4 mA/cm2 and time 10-60 min. The upper surface obtained after cathode sputtering was examined using SEM and the roughness was measured. The structure of upper surface was determined on the grounds of the GID investigations for different incidence angles (2°, 5° and 9°). The results show that voltage and intensity are the most important parameters of cathode sputtering. The duration of cathode sputtering affected very poorly the changes in upper surface and had only an influence on the roughness of the surface.
ホーム Begell Digital Portal Begellデジタルライブラリー ジャーナル 書籍 電子書籍 参考文献と会報 著者、編集者、レビュー者 A-Z商品インデックス 価格及び購読のポリシー Begell Houseの概要 連絡先 Language English 中文 Русский 日本語 Português Deutsch Français Español