Progress in Plasma Processing of Materials, 1999

ISBN Print: 1-56700-126-2

PLASIMO: A MODELING TOOL FOR MULTICOMPONENT POLYATOMIC PLASMAS

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DOI: 10.1615/ITPPC-1998.230
pages 147-152

G. M. Janssen Department of Applied Physics, NLf 1.0.4, Technische Universiteit Eindhoven, 5600 MB Eindhoven, The Netherlands

J. van Dijk Department of Applied Physics, Eindhoven University of Technology P.O. Box 513, 5600 MB Eindhoven, The Netherlands

D. A. Benoy Department of Applied Physics, Eindhoven University of Technology P.O. Box 513, 5600 MB Eindhoven, The Netherlands

M. A. Tas Department of Applied Physics, Eindhoven University of Technology P.O. Box 513, 5600 MB Eindhoven, The Netherlands

K.T.A.L. Burm Department of Applied Physics, Eindhoven University of Technology P.O. Box 513, 5600 MB Eindhoven

Joost J. A. M. van der Mullen Department of Applied Physics, Eindhoven University of Technology, P. O. Box 513, 5600 MB Eindhoven, The Netherlands

W. J. Goedheer FOM-Institute for Plasma Physics Rijnhuizen, Association EURATOM-FOM, Trilateral Euregio Cluster, PO Box 1207, 3430 BE Nieuwegein, The Netherlands

D. C. Schram Dept. of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands

要約

A numerical model for simulating plasmas, named PLASIMO, is presented. It is capable of simulating multicomponent polyatomic plasmas, in a wide pressure range (10−3 to 1 bar), in local thermal equilibrium (LTE) as well as non-LTE, and with different energy coupling principles. PLASIMO is a fluid model which numerically solves the set of hydrodynamical transport equations. The structure of the model is transparent. It is divided in three main modules: the main numerical part which forms the heart of the model, the plasma configuration part, and the gas composition part. The strong modularity makes PLASIMO easy to handle and easy to adjust or expand. The fundamentals of PLASIMO are presented and to demonstrate applications of the model it is applied to a flowing argon cascaded arc plasma, an argon ICP, and a hydrogen plasma in a diverging cascaded arc channel.

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