Autores, editores e revisores da Begell House

V.V. Naumov

Institute of Microelectronics of Russian Academy of Sciences, Universitetskaya 21, 150000 Yaroslavl, Russia

Obtenha mais informações sobre o autor no Diretório de especialistas

Articles

PLASMA STIMULATED GROWTH OF THIN FILMS Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999

STUDY OF LOW TEMPERATURE PLASMA-STIMULATED GROWTH OF YSZ THIN FILMS ON Si SUBSTRATE Vol. 1 '1999 - Progress in Plasma Processing of Materials, 1999