CHARGEDPARTICLE DENSITYPROFILES IN LOWPRESSURE PULSE DISCHARGEOF ELECTRONEGATIVE GASES

Electron, positive and negative ion kinetics and their densities n_e, n_p, n_n profiles forming in electronegative plasma of narrow pulse-periodic discharge, when a pulse duration t_i less than time of an establishment of stationary density profiles t_sp, are discussed. Densities n_e, n_p, n_n increasing in an active phase and two-stage plasma decay in pauses between pulses in the case of when n_n(t_i) > n_e(t_i) are analyzed. It is draw attention that the charged particle kinetics under consideration both during discharge pulses and in pauses between them n_e, n_p, n_n profiles can be supposed, as similar and not changing in time. Bessel type of n_e, n_p, n_n profiles in an oxygen plasma for t_i < t_sp are confirmed in experiment.