DEPOSITION OF COATINGS BY A JET RF-PLASMA OF LOW PRESSURE

Galiaoutdinov, R. T.; Kashapov, Nail F.

Progress in Plasma Processing of Materials, 2003

ISBN Imprimir: 978-1-56700-192-1

ISBN On-line: 978-1-56700-447-2

DEPOSITION OF COATINGS BY A JET RF-PLASMA OF LOW PRESSURE

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R. T. Galiaoutdinov Scientific and Research Institute of Pumping Engineering Technology apart. 20, house 42, Gavrilova str., Kazan 420137, Russia

Nail F. Kashapov Kazan Federal University, 18 Kremlevskaya Str., Kazan, 420008, Russia

Resumo

Were investigated basic electrophysical and mechanical characteristics of a dielectric and metal films.

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